Simulation of dilute flow in EUV optics

In order to investigate particle contamination in optics, currents in diluted gases are to be modelled. In a first work package, simulations were carried out and compared with measurements of a scaled model. This shows a very good agreement. However, a comparison with simulation results at the original optics shows a more or less uniform offset in the pressure distribution. The aim of the second work package is to adapt the geometry to achieve a more realistic pressure level.