This page is under construction !
A Wet chemical processes:
1 Standard Clean (RCA) fume hood
2 TMAH, PNA, Caro ... fume hood
3 HF fume hood
B Photolithography:
4 Fume hood for development
5 Fume hood for spin coating
6 Mask aligner MA6
7 Metal evaporation tool
8
9 RIE etching (Oxford Instruments)
10 RIE etching (Oxford Instruments)
11 RTP-System (ATV)
12
13 Analytics
a) Spectralellipsometer
b) Ellipsometer 632,8 nm
c) Interferometer S2000
d) Profilometer
e) Camera / Microscope
14 4-Needle prober
15 Electrical charakterization
16 Oxidation- und Temper furnace (Inotherm)
17 RTP-Anlage (Koyo)
18 Oxidation furnace + LPCVD system (Inotherm)
19 LPCVD-Nitridation
20 Centura CVD-cluster (Applied Materials)