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A Nasschemie:
    1   RCA-Digestorium                                      
    2   KOH, PNA, ... Digestorium                             
    3   HF Digestorium                                                 
                                                                                        
B Photolithographie:                                                 
    4   Entwicklungs-Digestorium                             
    5   Belackungs-Digestorium
    6   Belichter MA6                                             
                                                                                 
    7   Sputteranlage                                             
    8   Alu-Aufdampfanlage                                
    9   RIE-Ätzer (Oxford Instruments)          
  10   SF6-Ätzer                                                    
  11   RTP-System (ATV)                                    
  12   Plasma-Ätzer (Asyntis)

  13   Analytik
          a)  Spektralellipsometer
         
b)   Ellipsometer 632,8 nm
         
c)   Interferometer S2000
         
d)   Profilometer
         
e)   Kamera / Mikroskop
 
14   4-Spitzen-Messplatz
 
15   Elektrische Charakterisierung
 
16   Oxidations- und Temperofen (Inotherm)
 
17   RTP-Anlage (Mattson)
 
18   Oxidations-Ofen + LPCVD System (ATV)
 
19   LPCVD-Nitridation
 
20   Centura-Cluster (Applied Materials)